Pushing the limits of lithography
From Thermodynamics of Computation
- reference groups
- Computer Science Engineering to Address Energy Costs
- author-supplied keywords
- keywords
- authors
- Takashi Ito
- Shinji Okazaki
- title
- Pushing the limits of lithography
- type
- generic
- year
- 2000
- source
- Nature
- pages
- 1027-1031
- volume
- 406
- issue
- 6799
- link
- https://www.mendeley.com/catalogue/5c9985e5-a731-3d58-94e8-3569220a02d1/(0)
Counts
- Citation count
- 749
- Page views
- 0
Identifiers
- doi: 10.1038/35023233 (Google search)
- issn: 00280836
- sgr: 0034738987
- scopus: 2-s2.0-0034738987
- pui: 30690473
